These XY solutions have a choice of linear servomotors or ceramic servomotors with Renishaw tape scale, Invar scale and or RLE Laser closed loop position.

ALIO is the world leader in design and manufacture of precision stages and robotics for the nanometre precision motion world. The demand for more precision open centre stages than past legacy products has caused ALIO to introduce the most precise mechanical bearing open centre stages commercially available in the world market for atmosphere or UHV environments.

The open centre XY designs from 25 mm to over 400 mm of travel in each axis with large apertures for a wide range of applications needing not only nano repeatability and accuracy of position but extreme flatness and straightness of motion.

The stages are tested and qualified with a Renishaw ML10 laser interferometer traceable to NIST, giving ALIO true data and not optimistic spec sheet precision.

The ALIO 150 mm travel standard precision XY stage has X and Y flatness and straightness of linear travel of less than 2 microns (+/- 1 micron) per axis over 150 mm of travel. With Invar scales the repeatability is less than 150 nm (+/-75 nanometres) with an accuracy less than 1 micron without laser calibration. With less expensive tape scales on the 150 mm XY the accuracy un-calibrated is less than 7 micron (+/- 3.5 microns) over range with less than 0.4 microns of repeatability while maintaining the precision of flatness and straightness previously mentioned.

Leading the nano-precision motion systems world is not a statement but a passion to commitment.

If you would like more details about these exciting precision stages then contact Stirling Morley on 01376 333333 or email on stirling@micromech.co.uk

‘Nano precision a Standard’