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Micromech - A Force in Motion
01376 333333

Need to reduce your paperwork, cut your vendor base, lower costs/simplify production?
What's really required are products delivered from your supplier, ready to install when you need them!

Alio Air Bearing Stages - PDF Catalogues

ALIO has developed several air bearing systems for linear, rotary and patent pending X-Y Planar System.

ALIO linear air bearing systems utilise dovetail and custom designs with the purpose of exceeding nano-precision applications.

The Linear Dovetail Air Bearings Systems use NewWay Dovetail Bearings. These systems are also available with ceramic servo- motors or ironless cog-less linear servomotors depending on the customer’s application needs.

  • Up to 600 mm standard dovetail
  • Custom systems available up to 3 metres
  • Options of Linear Motor or Ceramic Servo Motors
  • Class 1 Clean Room compatible
  • Standard flatness of 0.25 microns per 25 mm of travel

Rotary Air Bearings used have either ceramic servomotors or frameless servomotors are fitted depending on customer application needs.

  • Custom systems are available
  • Class 1 Clean Room compatible
  • Standard radial and axial run-out less than 1 micron

Patent Pending X-Y Planar Motion System:

ALIO has developed the next generation of nano-precision X-Y Planar system for Semiconductor, FPD and other application needing less than 1 arc second of pitch, yaw and roll with picometre resolution over large volumes of product.

The ALIO team took a new approach to this new generation of equipment, which is needed, for the FPD and metrology markets. The larger glass for Gen 7, 8 and beyond in FPB, raises issues of maintaining high volume and high yields during process and inspection. The requirement results in the need for a new mechanical design to eliminate mechanical beam thermals, bending and orthogonality position errors.

The ALIO X-Y Planar system decouples and isolates the X and Y beam thermals, sage and alignment issues in a novel but simple kinematic design. The X-Y Planar system has an application dependant platen for open centre or vacuum wafer chuck mounting.

 




 

System Travel
300 mm x 300 mm
500 mm x 500 mm
1 meter x 1 meter
Drive System
Advanced Ceramic Servo Motor or Ironless Core Linear Motor
Feedback System
Non Contact Optical Encoder or Laser Interferometer Feedback
Resolution - Linear Encoder
5 nanometres with 4096x Interpolation
Resolution - Laser Interferometer
38 picometres with 4096x Interpolation
Load
Load Capacity is Sized for the Application (Please Consult the Factory)
Accuracy - Linear Encoder (XY)
Better Than +/- 0.5 um
Better Than +/- 0.75 um
Better Than +/- 1.0 um
Accuracy - Laser Interferometer (XY)
+/- 10 ppm Standard, +/- 1.5 ppm Compensated
Repeatability - Linear Encoder (XY)
+/- 50 nm
+/- 60 nm
+/- 80 nm
Repeatability - Laser Interferometer (XY)
+/- 10 nm
+/- 20 nm
+/- 30 nm
Straightness
+/- 0.5 um
+/- 1.0 um
+/- 1.5 um
Flatness (XY, Dependant on the Granite)
< +/- 0.5 um
< +/- 0.5 um
< +/- 1.0 um
Pitch/Roll
< 1 arc-second
Yaw
1 arc-second
Orthogonality
1 arc-second

 

 


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Micromech Ltd

5-8 Chilford Court, Rayne Rd, Braintree, Essex, CM7 2QS Tel: 01376 333333 Fax: 01376 551849

Copyright © 2012 Micromech Ltd. All rights reserved.

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