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Air Bearing Stages 
ALIO has developed several air bearing systems for linear, rotary and patent pending X-Y Planar System.
ALIO linear air bearing systems utilise dovetail and custom designs to exceed nano precision applications.
Linear Dovetail Air Bearings Systems using NewWay Dovetail Bearings. These systems are available with ceramic servo motors or ironless cogless linear servo motors depending on application needs.
Up to 600 mm standard dovetail - Custom systems up to 3 metres
- Linear Motor or Ceramic Servo Motors
- Class 1 Clean Room compatible
- Standard flatness of 0.25 microns per 25 mm of travel
Rotary Air Bearings with either ceramic servo motors or frameless servo motors.
Rotary Air Bearings Systems are available with ceramic servo motors or frameless rotary servo motors depending on application needs.
- Many standard models using Professional Instruments and ALIO bearings.
- Custom systems
- Servo Motor or Ceramic Servo Motors
- Class 1 Clean Room compatible
- Standard radial and axial runout less than 1 micron
X-Y Planar Air Bearing System
Patent Pending X-Y Planar Motion System:
ALIO has developed the next generation of nano-precision X-Y Planar system for Semiconductor, FPD and other application needing less than 1 arc second of pitch, yaw and roll with picometre resolution over large volumes. The ALIO team took a new approach to the next generation of equipment needed for the FPD and metrology markets. Larger glass for Gen 7, 8 and beyond in FPB the issues of maintaining high volume and high yields during process and inspection the need for a new mechanical design to eliminate mechanical beam thermals, bending and orthogonality position errors. The ALIO X-Y Planar system decouples and isolates the X and Y beam thermals, sage 
and alignment issues in a novel but simple kinematic design.
The X-Y Planar system has an application dependant platen for open centre or vacuum wafer chuck mounting.
| System Travel | 300 mm x 300 mm |
500 mm x 500 mm |
1 meter x 1 meter |
| Drive System | Advanced Ceramic Servo Motor or Ironless Core Linear Motor |
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| Feedback System | Non Contact Optical Encoder or Laser Interferometer Feedback |
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| Resolution - Linear Encoder | 5 nanometres with 4096x Interpolation |
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| Resolution - Laser Interferometer | 38 picometres with 4096x Interpolation |
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| Load | Load Capacity is Sized for the Application (Please Consult the Factory) |
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| Accuracy - Linear Encoder (XY) | Better Than +/- 0.5 um |
Better Than +/- 0.75 um |
Better Than +/- 1.0 um |
| Accuracy - Laser Interferometer (XY) | +/- 10 ppm Standard, +/- 1.5 ppm Compensated |
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| Repeatability - Linear Encoder (XY) | +/- 50 nm |
+/- 60 nm |
+/- 80 nm |
| Repeatability - Laser Interferometer (XY) | +/- 10 nm |
+/- 20 nm |
+/- 30 nm |
| Straightness | +/- 0.5 um |
+/- 1.0 um |
+/- 1.5 um |
| Flatness (XY, Dependant on the Granite) | < +/- 0.5 um |
< +/- 0.5 um |
< +/- 1.0 um |
| Pitch/Roll | < 1 arc-second |
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| Yaw | 1 arc-second |
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| Orthogonality | 1 arc-second |
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Copyright © 2008 Micromech Ltd. All rights reserved.
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