Alio Air Bearing Stages - PDF Catalogues
ALIO has developed several air bearing systems for linear, rotary and patent pending X-Y Planar System.
ALIO linear air bearing systems utilise dovetail and custom designs with the purpose of exceeding nano-precision applications.
The Linear Dovetail Air Bearings Systems use NewWay Dovetail Bearings. These systems are also available with ceramic servo- motors or ironless cog-less linear servomotors depending on the customer’s application needs.
- Up to 600 mm standard dovetail
- Custom systems available up to 3 metres
- Options of Linear Motor or Ceramic Servo Motors
- Class 1 Clean Room compatible
- Standard flatness of 0.25 microns per 25 mm of travel
Rotary Air Bearings used have either ceramic servomotors or frameless servomotors are fitted depending on customer application needs.
- Custom systems are available
- Class 1 Clean Room compatible
- Standard radial and axial run-out less than 1 micron
Patent Pending X-Y Planar Motion System:
ALIO has developed the next generation of nano-precision X-Y Planar system for Semiconductor, FPD and other application needing less than 1 arc second of pitch, yaw and roll with picometre resolution over large volumes of product.
The ALIO team took a new approach to this new generation of equipment, which is needed, for the FPD and metrology markets. The larger glass for Gen 7, 8 and beyond in FPB, raises issues of maintaining high volume and high yields during process and inspection. The requirement results in the need for a new mechanical design to eliminate mechanical beam thermals, bending and orthogonality position errors.
The ALIO X-Y Planar system decouples and isolates the X and Y beam thermals, sage and alignment issues in a novel but simple kinematic design. The X-Y Planar system has an application dependant platen for open centre or vacuum wafer chuck mounting.
| System Travel | 300 mm x 300 mm |
500 mm x 500 mm |
1 meter x 1 meter |
| Drive System | Advanced Ceramic Servo Motor or Ironless Core Linear Motor |
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| Feedback System | Non Contact Optical Encoder or Laser Interferometer Feedback |
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| Resolution - Linear Encoder | 5 nanometres with 4096x Interpolation |
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| Resolution - Laser Interferometer | 38 picometres with 4096x Interpolation |
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| Load | Load Capacity is Sized for the Application (Please Consult the Factory) |
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| Accuracy - Linear Encoder (XY) | Better Than +/- 0.5 um |
Better Than +/- 0.75 um |
Better Than +/- 1.0 um |
| Accuracy - Laser Interferometer (XY) | +/- 10 ppm Standard, +/- 1.5 ppm Compensated |
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| Repeatability - Linear Encoder (XY) | +/- 50 nm |
+/- 60 nm |
+/- 80 nm |
| Repeatability - Laser Interferometer (XY) | +/- 10 nm |
+/- 20 nm |
+/- 30 nm |
| Straightness | +/- 0.5 um |
+/- 1.0 um |
+/- 1.5 um |
| Flatness (XY, Dependant on the Granite) | < +/- 0.5 um |
< +/- 0.5 um |
< +/- 1.0 um |
| Pitch/Roll | < 1 arc-second |
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| Yaw | 1 arc-second |
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| Orthogonality | 1 arc-second |
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