Alio Hexapod Robotic Stages - PDF Catalogues
These Parallel Kinematic Robotics, ALIO Industries (US patents 6,769,194 and 6,671,975) parallel kinematic Tripod 3 axis and Hexapod 6 axis robotic systems are designed to meet the needs of manufacturing processes and inspection of products that require nano-metre resolution and repeatability.
The Hexapods have 5 nano-metre resolution revolving around a virtual point in space coupled with speeds of up to 250 mm/sec. These robotic products form the basis of the latest generation of automated nano-positioning systems for the most demanding applications in photonics, packaging, test, micro machining, government, measurement, medical and semiconductor manufacturing.
The ALIO Hexapod has fast settling times after a move with no servo dither or flexure bend on point and in addition the frictional force between the linear motor and the motion linkage means no hysteresis or loss of position if the power is lost.
The Hexapod and Tripod with additional preparation can also meet Class 10 clean room standards and systems can be provided that work in vacuum chambers 10e-10 TORR.
The performance of ALIO Hexapods is an order of magnitude more precise than Hexapods of the past where with complex forward and inverse kinematic equations in a parallel structure, the controller system is critical.
The ALIO Hexapod has 2 controller choices that are integrated into the total system, the Delta Tau and the ACS motion systems, both high end motion controllers with 4096 interpolation allow for 5nm encoder resolution oneachlink of the Hexapod. The motion controller 
provides the necessary structure to enable the user to easilyimplement and execute complex kinematic calculations. Kinematic calculations are required when there is a non-linear mathematical relationship between the tool-tip coordinates and the matching positions of the actuators (joints) of the mechanism, typical in non-Cartesian geometries.
This capability permits the motion for the machine to be programmed in the natural coordinates of the tool-tip which are usually Cartesian coordinates, whatever the underlying geometry of the machine. The 'forward-kinematic' calculations use the joint positions as input and convert them to tool-tip coordinates.
The ALIO Hexapod Advantage:
- Most precise Hexapod in the world.
- A range of 21 Hexapod modes
- Forward and inverse kinematics equations (point to point path and velocity regulation)
- 5 nm encoder resolution standard
- +/- 50nm repeatability or better (application dependant)
- 1 micron per second to over 250 mm/sec
- Vacuum compatible up to 10e-10 TORR
- Linear Optical Encoders
- 12 spherical ball joints for increased precision
- Ceramic servo motors
- No servo dither
- Zero backlash
- Smooth precise motion
- Custom OEM applications available
The ALIO Tripod Advantages
- Most precise Tripod in the world.
- A range of 21 Tripod
- Forward and inverse kinematics equations(point to point path and velocity regulation)
- 5 nm encoder resolution as standard
- +/- 50nm repeatability or better (application dependant)
- 1 micron per second to over 250 mm/sec
- Vacuum compatible up to 10e-10 TORR
- Linear optical encoders
- Ceramic servo motors
- No servo dither
- Zero backlash
- Smooth precise motion
- Custom OEM applications
 |
 |
 |
5-8 Chilford Court, Rayne Rd, Braintree, Essex, CM7 2QS Tel: 01376 333333 Fax: 01376 551849
Copyright © 2012 Micromech Ltd. All rights reserved.