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Rotary Stages
ALIO has developed ultra high precision rotary stages to meet and exceed today's demand for high precision motion.
Mechanical Rotary Stages
Mechanical bearings rotary stages have been design with crossed roller bearings for improved stiffness for off set loads and rotational precision. The ALIO attention to materials and machining is maintained in the rotary product line as with the linear products making sure the bearings and metal are located in ultra machined parallel surfaces. (Notice the precision lands on the top of the AI-80R-D picture.)
ALIO stages have a standard 0.2 arc second resolution with the ALIO supplier motion controllers. Typical standard mechanical crossed roller bearings are rated at 20 microns or radial and axial runout with optional 6 microns is also available.
Crossed Roller Bearing Goniometer
Goniometer stages are affective solution for 5 to 10 degrees of pitch and yaw applications. ALIO gonio product family has several size and mass capability all with precision crossed roller bearings for stiffness and precision.
Gimbal Rotational Stages
When ultra runout precision is needed customers can choose from our precision ground ceramic or air bearings. ALIO can customise theta stages to meet your demanding environment and precision needs with either of these designs.
| Renishaw Signum Interface Interpolators | 40R(arc sec) |
80R (arc sec) |
|
| Analog 1V p-p | SI-0000 | 0.03 |
0.02 |
| 5 micron | SI-0004 | 27.50 |
20.63 |
| 1 micron | SI-0020 | 5.50 |
4.13 |
| 0.5 micron | SI-0040 | 2.75 |
2.06 |
| 0.2 micron | SI-0100 | 1.10 |
0.83 |
| 0.1 micron | SI-0200 | 0.55 |
0.41 |
| 50 nm | SI-0400 | 0.28 |
0.21 |
| 20 nm | SI-1000 | 0.11 |
0.08 |
Copyright © 2008 Micromech Ltd. All rights reserved.
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