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Renishaw - RGH25F UHV - Incremental Encoder System with RGS Linear Scale

RGH25F UHV vacuum compatible linear encoder

RGH25F UHV linear encoder readhead is compatible with Renishaw's RGS20-S tape scale, providing high-fidelity direct position feedback in ultra-high vacuum conditions. Well-proven by years of use in the field, RGH25F UHV is fitted on semiconductor and scientific equipment around the world, where high performance and reliability simply cannot be compromised.

Compatible with REF interfaces

To further boost performance and long-term reliability, the RoHS compliant REF interface replaces the RGB and RGF series, bringing dynamic signal conditioning and resolutions to 5 nm.

The RGH25F UHV readhead has been manufactured in dedicated clean conditions, using materials and adhesives specially selected for their low out-gassing rates. The product is then packed and sealed in a vacuum-compliant bag to ensure cleanliness is maintained.




Vacuum compatible tape scale

The RGS20-S tape scale provides a highly-repeatable measuring standard that can be fitted to most common engineering materials used throughout semiconductor and scientific industries, including ZeroMet™, Zerodur®, stainless steel and aluminium. When the ends of the scale have been locked to the substrate using the recommended epoxy, the scale matches the thermal expansion coefficient of the substrate thus behaving as if the substrate itself has been graduated.

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Renishaw - RGH25F UHV