LIP/LIF/LIC - For application in high and ultrahigh vacuum technology
Our standard encoders are suitable for use in a low or medium vacuum. Encoders used for applications in a high or ultrahigh vacuum need to fulfill special requirements. Design and materials used have to be specially adapted for it. For more information, refer to the Technical Information document Linear Encoders for Vacuum Technology.
The following exposed linear encoders are specially adapted for use in high and ultrahigh vacuum environments.
|Model||Baseline Error||Substrate and mounting||Interpolation error||Measuring length|
|≤ ± 0.175 μm/ 5 mm||Scale of Zerodur glass ceramic or glass with fixing clamps||± 7 nm||70 mm to 420 mm|
|± 3 µm||≤ ± 0.225 μm/ 5 mm||Scale of Zerodur glass ceramic or glass with fixing clamps||± 12 nm||70 mm to 1020 mm|
|LIC 4113 V
LIC 4193 V
|±1 µm (only for Robax glass ceramic), ±3 µm, ±5 µm||≤ ±0.275 µm/10 mm||METALLUR scale grating on glass ceramic or glass||± 20 nm||240 mm to 3040 mm|
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