Micromech
01376 333333

Target positioning system used in laser research facility

Positioning of ‘micron scale’ Laser Targets within Vacuum Vessel

Application
Positioning of ‘micron scale’ Laser Targets within Vacuum Vessel

Scope of overall contract.
Supply of 4-Axis IN-VAC (Clean Room Prepared ) Laser target positioning-stage assembly package with local piezo servo motor drive control and encoder interface enclosure. Plus 4-axis sub-micron accuracy motion control system with embedded co-ordinate correction algorithm and ethernet PC interface.

Description of equipment and services supplied.
In Laser Research applications it is necessary to have the ability to manipulate a very small target sample in three dimensions in order to direct the Laser power at precise locations on the target sample. This can be achieved by initially acquiring a metrology image of the target using a laboratory based Vision System with high levels of Zoom and magnification.The acquired 3-D co-ordinates are then replicated on an identical positioning system within the Vacuum target chamber for target processing. Micromech Systems Ltd specified and pre-tested the Target-Positioning 4-axis motion stage assembly for carrying out this process. The Target Metrology System (TMS) with vision workstation was also supplied under a separate contract for this client.
Target Positioning System